Scanning Electron Microscope (SEM)                       SEM                       

FEI Quanta 600F  with BSE, EDS, ESEM, EBSD
FEI Helios Nanolab 650 for high resolution imaging

 STEM2Scanning Transmission Electron Microscope  (S/TEM) 

 JEOL JEM 2800
     with twin SDD detector for ultrafast EDS

 FIBFocused Ion Beam (FIB) 

 FEI Helios Nanolab 650
      with Pt, C, and W gas injectors  

 XPSX-ray Photoelectron Spectrometer (XPS)

 Kratos Axis Ultra DLD
      with imaging XPS, AES, ISS/LEIS

Atomic Force Microscope (AFM) AFM

Bruker Dimension Icon
    with ScanAsyst,  KPFM, Magnetic Force Microscopy, Fluid cell microscopy

ellipsometer Ellipsometer

 Woollam Spectroscopic
    Variable Angle Spectroscopic Ellipsometer (VASE)

 Optical microscopesOptical Microscopes

Keyence VHX-5000
Polyvar MET  with Brightfield and darkfield imaging

Optical ComparatorOptical comparator

 Vertex 220

ConfocalConfocal Microscope

Olympus FV-1000

 XRFX-ray Fluorescence Spectrometer (XRF)

 Eagle III Microspot

 ProfilometerOptical Profilometer

 Zygo NewView 5000


TEM Sample Prep Toolssample prep2

Allied Tools, Gatan prep tools, Fischione SEM mill