Scanning Electron Microscope (SEM)                       SEM                       

FEI Quanta 600F  with BSE, EDS, ESEM, EBSD
FEI Helios Nanolab 650 for high resolution imaging


 STEM2Scanning Transmission Electron Microscope  (S/TEM) 

 JEOL JEM 2800
     with twin SDD detector for ultrafast EDS


 FIBFocused Ion Beam (FIB) 

 FEI Helios Nanolab 650
      with Pt, C, and W gas injectors  


 XPSX-ray Photoelectron Spectrometer (XPS)

 Kratos Axis Ultra DLD
      with imaging XPS, AES, ISS/LEIS


Atomic Force Microscope (AFM) AFM

Bruker Dimension Icon
    with ScanAsyst,  KPFM, Magnetic Force Microscopy, Fluid cell microscopy


ellipsometer Ellipsometer

 Woollam Spectroscopic
    Variable Angle Spectroscopic Ellipsometer (VASE)


 Optical microscopesOptical Microscopes

Keyence VHX-5000
Reichert 
Polyvar MET  with Brightfield and darkfield imaging


Optical ComparatorOptical comparator

 Vertex 220


ConfocalConfocal Microscope

Olympus FV-1000


 XRFX-ray Fluorescence Spectrometer (XRF)

 Eagle III Microspot


 ProfilometerOptical Profilometer

 Zygo NewView 5000

      

TEM Sample Prep Toolssample prep2

Allied Tools, Gatan prep tools, Fischione SEM mill