Scanning Electron Microscope (SEM)
FEI Quanta 600F
with BSE, EDS, ESEM, EBSD
Scanning Transmission Electron Microscope (S/TEM)
JEOL JEM 2800
with twin SDD detector for ultrafast EDS
X-ray Photoelectron Spectrometer (XPS)
Kratos Axis Ultra DLD
with imaging XPS, AES, ISS/LEIS
X-ray Fluorescence Spectrometer (XRF)
Eagle III Microspot