Woollam Variable Angle Spectroscopic Ellipsometer (VASE)

The Variable Angle Spectroscopic Ellipsometer (VASE) is primarily used to measure the thickness and optical properties (index of refraction and extinction coefficient) of thin film materials. Measurements are made by analyzing polarized light reflected from the sample surface, and fitting the measured data to a model. Typically dielectric and semiconductor films are measured, though very thin metal films can also be analyzed.

Instrument Features

  • Small Spot Focusing optics
  • Analysis of a wide variety of materials: Semiconductors, polymers, metals, thin films, and multiple layers.
  • Generalized Ellipsometry
  • Reflectance Intensity (R)
  • Transmittance Intensity (T)
  • Cross-polarized (R/T)
  • Depolarization

Uses and Applications

  • Thickness measurement of transparent films on transparent substrate
  • Optical Coatings
  • Photosensitive Coatings

Data Acquired

  • Film thickness (~1 monolayer to > 1 μm)
  • Single layers
  • Multiple layers
  • Surface Roughness
  • Index of refraction
  • Extinction coefficient

Measurement Capabilities

  • Wavelength Range: 190 – 2000 nm
  • Xe Arc lamp and monochromator
  • Tungsten-halogen lamp
  • Angles: 70 to 75 typical
  • Use focusing optics

On Campus Users: $25.00 Dr. Brian Van Devener
Off Campus Academic Users $38.00 Lab: 801-587-3108
Industry Rate $50.00 Office: 801-585-6162
Industry Expedite Rate $150.00